The automated control of a process. Process control is used extensively in oil refining, chemical processing, electrical generation and the food and beverage industries where the creation of a product ...

In process automation, an alarm is defined as an audible and/or visible means of indicating to the operator an equipment malfunction, process deviation, or abnormal condition requiring an operator ...

Overlay control based on DI metrology of optical targets has been the primary basis for run-to-run process control for many years. In previous work we described a scenario where optical overlay ...