Maskless lithography using digital micromirror devices is becoming a cost-effective and adaptable option for equipment ...
§ Sensor Science Division, National Institute of Standards and Technology, 100 Bureau Drive, Gaithersburg, Maryland 20899, United States ⊥ Institute for Research in Electronics and Applied Physics, ...
Abstract: An X-ray lithography system is analyzed in terms of maximizing the absorbed energy density in the resist. The individual factors, such as X-ray quantum efficiency, electron-beam energy, ...
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