The halcyonics_i4 is a state-of-the-art active vibration isolation system, which is ideal for isolating high-resolution measurement equipment from building vibrations and other disturbances. Besides ...
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The rapid expansion of the semiconductor industry and the increasing demand for high speed, high precision positioning stages necessitate exceptionally precise active control of pneumatic vibration ...
Abstract: External interference is an important factor affecting the accuracy and stability of precision equipment. An active micro-vibration isolation control method is proposed and used in active ...